UNIT I INTRODUCTION Intrinsic Characteristics of MEMS - Energy Domains and Transducers - Sensors and Actuators - Introduction to Micro fabrication - Silicon based MEMS processes - New Materials - Review of Electrical and Mechanical concepts in MEMS - Semiconductor devices - Stress and strain analysis - Flexural beam bending- Torsional deflection. (Chapter - 1) UNIT II SENSORS AND ACTUATORS - I Electrostatic sensors - Parallel plate capacitors - Applications - Interdigitated Finger capacitor - Comb drive devices - Micro Grippers - Micro Motors - Thermal Sensing and Actuation - Thermal expansion - Thermal couples - Thermal resistors - Thermal Bimorph - Applications - Magnetic Actuators - Micromagnetic components - Case studies of MEMS in magnetic actuators- Actuation using Shape Memory Alloys. (Chapter - 2) UNIT III SENSORS AND ACTUATORS - II Piezoresistive sensors - Piezoresistive sensor materials - Stress analysis of mechanical elements - Applications to Inertia, Pressure, Tactile and Flow sensors - Piezoelectric sensors and actuators - piezoelectric effects - piezoelectric materials - Applications to Inertia, Acoustic, Tactile and Flow sensors. (Chapter - 3) UNIT IV MICROMACHINING Silicon Anisotropic Etching - Anisotrophic Wet Etching - Dry Etching of Silicon - Plasma Etching - Deep Reaction Ion Etching (DRIE) - Isotropic Wet Etching - Gas Phase Etchants - Case studies - Basic surface micro machining processes - Structural and Sacrificial Materials - Acceleration of sacrificial Etch - Striction and Antistriction methods - LIGA Process - Assembly of 3D MEMS - Foundry process. (Chapter - 4) UNIT V POLYMER AND OPTICAL MEMS Polymers in MEMS - Polimide - SU-8 - Liquid Crystal Polymer (LCP) - PDMS - PMMA - Parylene - Fluorocarbon - Application to Acceleration, Pressure, Flow and Tactile sensors - Optical MEMS - Lenses and Mirrors - Actuators for Active Optical MEMS. (Chapter - 5)
